Modeling and analysis of hydrogen–methane plasma in electron cyclotron resonance chemical vapor deposition of diamond-like carbon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Reference24 articles.
1. Influence of a direct current bias on the energy of ions from an electron cyclotron resonance plasma
2. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon
3. Structural investigation of thin films of diamondlike carbon
4. Optical constants and associated functions of metastable diamondlike amorphous carbon films in the energy range 0.5–7.3 eV
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