Influence of a direct current bias on the energy of ions from an electron cyclotron resonance plasma-Reference-Cited by-同舟云学术

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Influence of a direct current bias on the energy of ions from an electron cyclotron resonance plasma

Published:1992-05 Issue:3 Volume:10 Page:434-438
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Reinke P.,Schelz S.,Jacob W.,Möller W.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.578167

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