X-ray reflectivity studies on DLC films deposited by microwave ECR CVD: Effect of substrate bias-Reference-Cited by-同舟云学术

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X-ray reflectivity studies on DLC films deposited by microwave ECR CVD: Effect of substrate bias

Published:2009-01 Issue:8 Volume:203 Page:986-991
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Singh S.B.,Poswal A.K.,Pandey M.,Tokas R.B.,Chand N.,Dhara S.,Sundaravel B.,Nair K.G.M.,Sahoo N.K.,Patil D.S.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference23 articles.

1. Hard carbon films deposited under high ion flux

2. Pulsed laser deposition of diamond‐like amorphous carbon films from graphite and polycarbonate targets

3. Nucleation of allotropic carbon in an external electric field

4. Structural models of a-C and a-C:H

5. Diamond-like carbon: state of the art

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development of Hetero-Junction Cells with a DLC Film Anti-reflection Layer;Environmental Science and Engineering;2024

2. Effects of annealing atmospheres (Ar, N2 and air) on structural, morphological, and surface corrosion properties of a-C:H thin films;Diamond and Related Materials;2019-10

3. Optical and Electrical Properties of Diamond-Like Carbon Thin Film with Deposition by ECR-CVD System;Key Engineering Materials;2019-07

4. Regulating the uniformity of DLC films in ECR plasma with negative substrate biasing;Surface and Coatings Technology;2019-05

5. The correlation between optical and mechanical properties of amorphous diamond-like carbon films prepared by pulsed filtered cathodic vacuum arc deposition;Thin Solid Films;2018-05

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