Transmission electron microscopic observation of nanoindentations made on ductile-machined silicon wafers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2133908
Reference26 articles.
1. Phase transition in diamond-structure crystals during hardness measurements
2. Electron microscope investigation of the microplastic deformation mechanisms of silicon by indentation
3. Amorphization and Conductivity of Silicon and Germanium Induced by Indentation
4. New evidence for a pressure-induced phase transformation during the indentation of silicon
5. The extent of phase transformation in silicon hardness indentations
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