Si/SiO2interface structures in laser‐recrystallized Si on SiO2
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.102433
Reference17 articles.
1. Three-dimensional CMOS IC's Fabricated by using beam recrystallization
2. Subthreshold slope of thin-film SOI MOSFET's
3. CMOS circuits made in thin SIMOX films
4. Crystallographic orientation control of silicon stripes in SiO2grooves using a new double laser annealing technique
5. Two-Step Laser Recrystallization of Silicon Stripes in Sio2 Grooves for Crystallographic Orientation Control
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1. Formation of patterned buried insulating layer in Si substrates by He+ implantation and annealing in oxidation atmosphere;Applied Physics Letters;2003-06-23
2. 50‐nm‐Thick Silicon‐on‐Insulator Fabrication by Advanced Epitaxial Lateral Overgrowth: Tunnel Epitaxy;Journal of The Electrochemical Society;1993-04-01
3. Performance of thin-film transistors on polysilicon films grown by low-pressure chemical vapor deposition at various pressures;IEEE Transactions on Electron Devices;1992-03
4. Improvement of SiO2 / Si Interface Flatness by Post‐Oxidation Anneal;Journal of The Electrochemical Society;1991-03-01
5. Structure of polycrystalline silicon films by ultraviolet pulse laser annealing;Electronics and Communications in Japan (Part II: Electronics);1991
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