Autocorrelation function analysis of phase formation in the initial stage of interfacial reactions of molybdenum thin films on (111)Si
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110846
Reference20 articles.
1. Disordered intermixing at the platinum:silicon interface demonstrated by high‐resolution cross‐sectional transmission electron microscopy, Auger electron spectroscopy, and MeV ion channeling
2. Effects of backsputtering and amorphous silicon capping layer on the formation of TiSi2in sputtered Ti films on (001)Si by rapid thermal annealing
3. Interactions of thin Ti films with Si, SiO2, Si3N4, and SiOxNyunder rapid thermal annealing
4. Growth kinetics of amorphous interlayer formed by interdiffusion of polycrystalline Ti thin‐film and single‐crystal silicon
5. Growth kinetics of amorphous interlayers by solid‐state diffusion in polycrystalline Zr and Hf thin films on (111)Si
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