Study of reactive ion etching‐induced damage in GaAs/AlGaAs structures using a quantum well intermixing probe
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.111061
Reference5 articles.
1. GaAs/GaAlAs curved rib waveguides
2. Investigation of reactive ion etching induced damage in GaAs–AlGaAs quantum well structures
3. Suppression of bandgap shifts in GaAs/AlGaAs quantum wells using strontium fluoride caps
4. Dependence of residual damage on temperature during Ar+sputter cleaning of silicon
5. Etching procedures of GaAs: Cathodoluminescence study of the induced damages and of the recovering techniques
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