Two‐dimensional model of ion dynamics during plasma source ion implantation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.111807
Reference8 articles.
1. Plasma source ion‐implantation technique for surface modification of materials
2. Model of plasma source ion implantation in planar, cylindrical, and spherical geometries
3. Numerical simulation of plasma sheath expansion, with applications to plasma‐source ion implantation
4. Model of plasma immersion ion implantation
5. Ion-matrix sheath structure around cathodes of complex shape
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