Laser chemical vapor deposition of TiN dots: A comparison of theoretical and experimental results
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.352351
Reference23 articles.
1. Direct Writing Using Laser Chemical Vapor Deposition
2. Laser chemical vapor deposition: A technique for selective area deposition
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4. Laser chemical vapor deposition of Ti from TiBr4
5. Wafer-Scale Laser Lithography: I. Pyrolytic Deposition Of Metal Microstructures
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