Influence of substrate stress on in-plane and out-of-plane ferroelectric properties of PZT films-Reference-Cited by-同舟云学术

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Influence of substrate stress on in-plane and out-of-plane ferroelectric properties of PZT films

Published:2022-01-07 Issue:1 Volume:131 Page:014101
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Aruchamy Naveen¹²^ORCID,Schenk Tony¹^ORCID,Girod Stephanie¹,Glinsek Sebastjan¹^ORCID,Defay Emmanuel¹^ORCID,Granzow Torsten¹^ORCID

Affiliation:

1. Department of Materials Research and Technology, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg

2. Department of Physics and Materials Science, University of Luxembourg, 41 rue du Brill, L-4422 Belvaux, Luxembourg

Funder

Fonds National de la Recherche Luxembourg

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0072503

Reference41 articles.

1. Improving transverse actuation of piezoceramics using interdigitated surface electrodes

2. M. M. Zaki, S. Zähringer, and N. Schwesinger, “Simulation of thick film PZT actuators with interdigitated electrodes,” in Proceedings of Smart Sensors, Actuators, and MEMS VI (SPIE Microtechnologies, Grenoble, 2013), Vol. 8763, p. 876338.

3. Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

4. DIRECT PIEZOELECTRIC COUPLING TO SURFACE ELASTIC WAVES

5. Design and Analysis of a Novel Surface Acoustic Wave Micro Position Sensor

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1. Increased fatigue resistance in transparent lead zirconate titanate thin films with interdigitated electrodes;Journal of the European Ceramic Society;2023-06

2. Stress-tuning the bulk photovoltaic response in polycrystalline bismuth ferrite films;Applied Physics Letters;2023-04-10

3. Flexible Pb(Zr0.52,Ti0.48)O3 thin film acoustic emission sensor for monitoring partial discharge in power cable;AIP Advances;2023-03-01

4. Effect of electrically induced cracks on the properties of PZT thin film capacitors;Applied Physics Letters;2022-12-05

5. Chemical Bath Deposition Grown Zno Thin Films: Role of Manganese Doping;Journal of Nano Research;2022-11-21

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