Effect of heat treatment on the nanoporosity of silica PECVD films elucidated by low-energy positron annihilation and ellipsometric porosimetry-Reference-Cited by-同舟云学术

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Effect of heat treatment on the nanoporosity of silica PECVD films elucidated by low-energy positron annihilation and ellipsometric porosimetry

Published:2017-11-10 Issue:18 Volume:122 Page:185304
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:J. Appl. Phys.

Author:

Yoshimoto Shigeru¹²³,Kumagai Kazuhiro¹,Hosomi Hiroyuki³,Takeda Masaaki³,Tsuru Toshinori²,Ito Kenji¹

Affiliation:

1. National Institute of Advanced Industrial Science and Technology (AIST), 1–1–1 Higashi, Tsukuba, Ibaraki 305–8565, Japan

2. Hiroshima University, 1–4–1 Kagamiyama, Higashi-Hiroshima, Hiroshima 739–8527, Japan

3. Toray Research Center, Inc., 3–3–7 Sonoyama, Otsu, Shiga 520–8567, Japan

Funder

MEXT | Japan Society for the Promotion of Science

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Reference25 articles.

1. Tunability of Pore Diameter and Particle Size of Amorphous Microporous Silica for Diffusive Controlled Release of Drug Compounds

2. Microporous Silica Films

3. Glucose oxidase enzyme immobilized porous silica for improved performance of a glucose biosensor

4. Design of Silica Networks for Development of Highly Permeable Hydrogen Separation Membranes with Hydrothermal Stability

5. Thermal Desorption and Infrared Studies of Sol‐Gel Derived SiO2 Coatings on Si Wafers

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Open Porosity and Pore Size Distribution of Mesoporous Silica Films Investigated by Positron Annihilation Lifetime Spectroscopy and Ellipsometric Porosimetry;Materials;2021-06-18

2. Improvement of the far-infrared optical property for glasses by plasma-assisted dispersion of fluorocarbon species into the shallow surface;Review of Scientific Instruments;2021-06-01

3. Review of infrared spectroscopy techniques for the determination of internal structure in thin SiO2 films;Vibrational Spectroscopy;2021-05

4. Tailoring Ultramicroporosity To Maximize CO2 Transport within Pyrimidine-Bridged Organosilica Membranes;ACS Applied Materials & Interfaces;2019-01-29

5. Subnanopore filling during water vapor adsorption on microporous silica thin films as seen by low-energy positron annihilation;Applied Physics Letters;2018-02-19

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