Quantitative measurement of piezoelectric coefficient of thin film using a scanning evanescent microwave microscope
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2940275
Reference15 articles.
1. Ferroelectric thin films for micro-sensors and actuators: a review
2. Longitudinal piezoelectric coefficient measurement for bulk ceramics and thin films using pneumatic pressure rig
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4. Interferometric measurements of electric field‐induced displacements in piezoelectric thin films
5. Piezoelectric measurements with atomic force microscopy
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