Role of hydrogen for the elastic properties of alumina thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1448389
Reference14 articles.
1. Study of thin alumina coatings sputtered on polyethylene terephthalate films
2. Properties of radio frequency–sputtered alumina films on flat and grooved substrates
3. Phase formation and mechanical properties of alumina coatings prepared at substrate temperatures less than 500 °C by ionized and conventional sputtering
4. Hydrogen uptake in alumina thin films synthesized from an aluminum plasma stream in an oxygen ambient
5. On the effect of hydrogen incorporation in strontium titanate layers grown by high vacuum magnetron sputtering
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