Phase formation and mechanical properties of alumina coatings prepared at substrate temperatures less than 500 °C by ionized and conventional sputtering-Reference-Cited by-同舟云学术

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Phase formation and mechanical properties of alumina coatings prepared at substrate temperatures less than 500 °C by ionized and conventional sputtering

Published:1997-10 Issue: Volume:94-95 Page:179-183
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Jochen M. Schneider,William D. Sproul,Allan Matthews

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference29 articles.

1. CVD coatings based on medium temperature CVD κ- and α-Al2O3

2. Space-group determination and structure model for κ-Al2O3 by convergent-beam electron diffraction (CBED)

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3. Effect of Si on DC arc plasma generation from Al-Cr and Al-Cr-Si cathodes used in oxygen;Journal of Applied Physics;2017-02-28

4. Highly insulating alumina films by a bipolar reactive MF sputtering process with special arc handling;Surface and Coatings Technology;2016-03

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