Atom-by-atom simulations of chemical vapor deposition of nanoporous hydrogenated silicon nitride
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3371680
Reference35 articles.
1. Surface passivation of crystalline silicon solar cells: a review
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3. The Application of Silicon Rich Nitride Films for Use as Deep-Ultraviolet Lithography Phase-Shifting Masks
4. Amorphous silicon rich silicon nitride optical waveguides for high density integrated optics
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