Small microwave ion source for an ion implanter
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1146797
Reference4 articles.
1. A high‐current density and long lifetime ECR source for oxygen implanters
2. High‐current dc microwave ion sources (invited)
3. Advanced high‐current ECR ion sources for implanters
4. A high‐current microwave ion source for ion implantation
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