Role of atomic oxygen produced by an electron cyclotron resonance plasma in the oxidation of YBa2Cu3O7−xthin films studied byinsituresistivity measurement
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.104147
Reference11 articles.
1. Insitugrown YBa2Cu3O7−dthin films from single‐target magnetron sputtering
2. Preparation of Y‐Ba‐Cu oxide superconductor thin films using pulsed laser evaporation from highTcbulk material
3. In situ growth of superconducting YBaCuO using reactive electron-beam coevaporation
4. Single-Crystal YBa2Cu3O7-xThin Films by Activated Reactive Evaporation
5. Thin Film Growth of YBa2Cu3O7-xby ECR Oxygen Plasma Assisted Reactive Evaporation
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