Properties of higher-order surface acoustic wave modes in Al1−xScxN/sapphire structures-Reference-Cited by-同舟云学术

Properties of higher-order surface acoustic wave modes in Al1−xScxN/sapphire structures

Published:2021-10-28 Issue:16 Volume:130 Page:164501
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Feil N. M.¹^ORCID,Mayer E.²,Nair A.³,Christian B.¹^ORCID,Ding A.³^ORCID,Sun C.¹,Mihalic S.¹,Kessel M.⁴,Žukauskaitė A.³^ORCID,Ambacher O.¹³^ORCID

Affiliation:

1. Gips-Schüle Chair for Power Electronics, INATECH—Department of Sustainable Systems Engineering, University of Freiburg, Freiburg, Baden-Württemberg 79110, Germany

2. Department of Business and Industrial Engineering, Offenburg University of Applied Sciences, Gengenbach, Baden-Würtemberg 77723, Germany

3. Fraunhofer Institute for Applied Solid State Physics, Freiburg, Baden-Württemberg 79108, Germany

4. Carl Zeiss SMT GMBH, Oberkochen, Baden-Württemberg 73447, Germany

Funder

Deutsche Forschungsgemeinschaft

Gips-Schüle-Stiftung

Carl-Zeiss-Stiftung

Bundesministerium für Bildung und Forschung

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0055028

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