Plasma sheath physics and dose uniformity in enhanced glow discharge plasma immersion ion implantation and deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3160309
Reference11 articles.
1. Recent developments and applications of plasma immersion ion implantation
2. Surface improvements of industrial components treated by plasma immersion ion implantation (PIII): results and prospects
3. Effects of electron-focusing electric field upon enhanced glow discharge plasma ion implantation
4. Investigation of plasma distribution in electron-focused electric field enhanced glow discharge plasma immersion ion implantation
5. Experimental investigation of hybrid-evaporation-glow discharge plasma immersion ion implantation
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2. Effects of the dynamic cathode sheath on electron transport at the initial period of HiPIMS pulse studied by Langmuir probe measurements and 2D PIC-MCC simulation;Surface and Coatings Technology;2020-12
3. Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube;Applied Surface Science;2017-01
4. Numerical simulation of enhanced glow discharge plasma immersion ion implantation using three-dimensional PIC/MC model;Acta Physica Sinica;2012
5. Improved hydrogen ionization rate in enhanced glow discharge plasma immersion ion implantation by enlarging the interaction path using an insulating tube;Review of Scientific Instruments;2011-02
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