Formation of distorted rutile-type NbO2, MoO2, and WO2 films by reactive sputtering
Author:
Affiliation:
1. Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan
Funder
Nippon Sheet Glass Foundation for Materials Science and Engineering
Japan Society for the Promotion of Science
Mazda Foundation
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5079719
Reference37 articles.
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