On the residual stress and fracture strength of crystalline silicon wafers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4776706
Reference18 articles.
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5. B. Sopori, V. Budhraja, P. Rupnowski, S. Johnston, N. Call, H. Moutinho, and M. Al-Jassim, in Proceedings of the 34th IEEE PVSC (1969), 2009.
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