Ar (3P2) induced chemical vapor deposition of hydrogenated amorphous silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.95914
Reference12 articles.
1. Silicon Thin-Film Formation by Direct Photochemical Decomposition of Disilane
2. Growth of Hydrogenated Amorphous Silicon Films by ArF Excimer Laser Photodissociation of Disilane
3. Optical and electrical properties of amorphous silicon films prepared by photochemical vapor deposition
4. The far ultraviolet spectra of methylsilanes
5. The photoelectron spectra of methane, silane, germane and stannane
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