Electrowetting-on-dielectric actuation of a vertical translation and angular manipulation stage-Reference-Cited by-同舟云学术

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Electrowetting-on-dielectric actuation of a vertical translation and angular manipulation stage

Published:2016-12-12 Issue:24 Volume:109 Page:244102
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Preston Daniel J.¹,Anders Ariel²^ORCID,Barabadi Banafsheh¹,Tio Evelyn¹,Zhu Yangying¹^ORCID,Dai DingRan Annie¹,Wang Evelyn N.¹

Affiliation:

1. Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA

2. Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA

Funder

National Science Foundation (NSF)

Office of Naval Research Global (ONRG)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4971777

Reference53 articles.

1. S. K. Sinha , N. Satyanarayana , and S. C. Lim , Nano-Tribology and Materials in MEMS ( Springer, Berlin, Heidelberg, 2013), p. 1.

2. Suppression of Stiction in MEMS

3. Adhesion and stiction: Mechanisms, measurement techniques, and methods for reduction

4. On MEMS Reliability and Failure Mechanisms

5. Tribology and MEMS

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