Innovative all-silicon based a-SiN<sub>x</sub>:O/c-Si heterostructure solar-blind photodetector with both high responsivity and fast response speed-Reference-Cited by-同舟云学术

Innovative all-silicon based a-SiN_x:O/c-Si heterostructure solar-blind photodetector with both high responsivity and fast response speed

Published:2022-02-01 Issue:2 Volume:7 Page:026102
ISSN:2378-0967
Container-title:APL Photonics
language:en
Short-container-title:APL Photonics

Author:

Dong Hengping¹²^ORCID,Chen Kunji¹^ORCID,Yang Huafeng¹,Ma Zhongyuan¹^ORCID,Xu Jun¹^ORCID,Li Wei¹,Yu Linwei¹^ORCID,Huang Xinfan¹

Affiliation:

1. National Laboratory of Solid State Microstructures, School of Electronic Science and Engineering, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, People’s Republic of China

2. Taizhou Institute of Science and Technology, Nanjing University of Science and Technology, Taizhou 225300, People’s Republic of China

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Project 333 of Jiangsu Province

Science and Technology Support Program of Taizhou

Publisher

AIP Publishing

Subject

Computer Networks and Communications,Atomic and Molecular Physics, and Optics

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0071602

Reference42 articles.

1. New concept ultraviolet photodetectors

2. Graphene/Si-Quantum-Dot Heterojunction Diodes Showing High Photosensitivity Compatible with Quantum Confinement Effect

3. Solar-blind deep-UV band-pass filter (250 - 350 nm) consisting of a metal nano-grid fabricated by nanoimprint lithography

4. A High-Performance SiO2/SiN x 1-D Photonic Crystal UV Filter Used for Solar-Blind Photodetectors

5. Ultrawide‐Bandgap Semiconductors: Research Opportunities and Challenges

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