Control of mechanical response of freestanding PbZr0.52Ti0.48O3 films through texture-Reference-Cited by-同舟云学术

Control of mechanical response of freestanding PbZr0.52Ti0.48O3 films through texture

Published:2016-09-26 Issue:13 Volume:109 Page:131905
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Das Debashish¹,Sanchez Luz²,Martin Joel²,Power Brian²,Isaacson Steven³,Polcawich Ronald G.²,Chasiotis Ioannis¹

Affiliation:

1. Aerospace Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA

2. U.S. Army Research Laboratory, Adelphi, Maryland 20783, USA

3. General Technical Services, Wall, New Jersey 07719, USA

Funder

Army Research Office (ARO)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/am-pdf/10.1063/1.4963348

Reference53 articles.

1. PROCESSING AND CHARACTERIZATION OF PIEZOELECTRIC MATERIALS AND INTEGRATION INTO MICROELECTROMECHANICAL SYSTEMS

2. M. Murata , T. Kondoh , T. Yagi , N. Funatsu , K. Tanaka , H. Tsukuni , K. Ohno , H. Usami , R. Nayve , N. Inoue , S. Seto , and N. Morita , in 2009 IEEE 22nd International Conference Micro Electro Mechanical Systems (IEEE, 2009), pp. 507–510.

3. PZT-Based Piezoelectric MEMS Technology

4. P. Muralt , in Piezoelectricity ( Springer, Berlin/Heidelberg, 2008), pp. 351–376.

5. J. R. Bronson , J. S. Pulskamp , R. G. Polcawich , C. M. Kroninger , and E. D. Wetzel , in 2009 IEEE 22nd International Conference Micro Electro Mechnical System (IEEE, 2009), pp. 1047–1050.

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Thermal stress accommodation in dip cast lead zirconate‐titanate ferroelectric films on flexible substrates;Journal of the American Ceramic Society;2022-01-29

2. Control of Domain States in Rhombohedral Lead Zirconate Titanate Films via Misfit Strains and Surface Charges;Advanced Electronic Materials;2021-07-03

3. Nonlinear electric field dependence of the transverse piezoelectric response in a (001) ferroelectric film;Scripta Materialia;2020-12

4. Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems;Acta Materialia;2020-06

5. Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films;Journal of Micromechanics and Microengineering;2020-01-30