One-dimensional time-dependent fluid model of a very high density low-pressure inductively coupled plasma
Author:
Affiliation:
1. Applied Physics Department, California Institute of Technology, Pasadena, California 91125, USA
Funder
National Science Foundation (NSF)
U.S. Department of Energy (DOE)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.4938490
Reference28 articles.
1. M. A. Lieberman and A. J. Lichtenberg , Principles of Plasma Discharges and Materials Processing, 2nd edn. ( Wiley-Interscience, Hoboken, NJ, 2005).
2. Pulsed high-density plasmas for advanced dry etching processes
3. Spatially averaged (global) model of time modulated high density argon plasmas
4. Effect of multistep ionizations on the electron temperature in an argon inductively coupled plasma
5. Pulsed-power plasma reactors: two-dimensional electropositive discharge simulation in a GEC reference cell
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Temporal evolution of the light emitted by a thin, laser-ionized plasma source;Physics of Plasmas;2024-01-01
2. Insights from Collisional-Radiative Models of Neutral and Singly Ionized Xenon in Hall Thrusters;Journal of Propulsion and Power;2022-09
3. Insights from Collisional-Radiative Models of Neutral and Singly-Ionized Xenon in Hall Thrusters;AIAA Propulsion and Energy 2021 Forum;2021-07-28
4. Metastables as a probe for low-temperature plasma characteristics in argon;Journal of Physics D: Applied Physics;2019-03-14
5. Emission and afterglow properties of an expanding RF plasma with nonuniform neutral gas density;Physics of Plasmas;2016-08
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3