Ion beam synthesis of heteroepitaxial Si/CoSi2/Si structures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.345602
Reference21 articles.
1. New trends in SIMOX
2. Mesotaxy: Single‐crystal growth of buried CoSi2layers
3. Synthesis of Buried Silicon Compounds Using Ion Implantation
4. Buried Silicide Synthesis and Strain in Cobalt-Implanted Silicon
5. Synthesis of heteroepitaxial Si/CoSi2/Si structures by Co implantation into Si
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