Validation of ion temperature measurement using an ion sensitive probe technique in finite boundary RF plasma
Author:
Affiliation:
1. Department of Quantum Science and Energy Engineering, Tohoku Univ. 6-6-01-2 Aobayama, Sendai 980-8579, Japan
2. Department of Applied Energy, Nagoya Univ. Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
Funder
Japan Society for the Promotion of Science
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5083214
Reference18 articles.
1. Density threshold for plasma detachment in gas target
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4. Retarding‐field analyzer for measurements of ion energy distributions and secondary electron emission coefficients in low‐pressure radio frequency discharges
5. Ion Sensitive Probe-A New Diagnostic Method for Plasma in Magnetic Fields
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