Interface study of hydrogenated amorphous silicon nitride on hydrogenated amorphous silicon by x‐ray photoelectron spectroscopy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.102299
Reference17 articles.
1. Amorphous Semiconductor Superlattices
2. Properties of amorphous semiconducting multilayer films
3. Amorphous Silicon Superlattice Thin Film Transistors
4. Properties of amorphous semiconductinga−Si:Ha−SiNx:Hmultilayer films and ofa−SiNx:Halloys
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