Author:
Wittmer M.,Ting C.‐Y.,Tu K. N.
Subject
General Physics and Astronomy
Cited by
35 articles.
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1. Intermetallics;Materials Science and Technology;2006-09-15
2. Semiconductor Contact Technology;Handbook of Semiconductor Interconnection Technology, Second Edition;2006-02-22
3. Effect of implanted phosphorus on silicide formation in the Cr/Si(111) system;Thin Solid Films;2001-04
4. Metal contacts on shallow junctions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-01
5. Characteristics of TiSi2 contact to BF2-doped single-silicon;Journal of Materials Science;1993-09