Low dielectric constant porous diamond films formed by diamond nanoparticles
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1609659
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1. Technology for advanced high-performance microprocessors
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3. Nanoporous Silica For Low K Dielectrics
4. Raman scattering from nanometer‐sized diamond
5. Ultrahigh particle density seeding with nanocrystal diamond particles
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