Differences in physical properties of hydrogenated and fluorinated amorphous silicon carbide prepared by reactive sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.350496
Reference19 articles.
1. Electrical and optical properties of amorphous Si:F:H alloys
2. The effects of incorporating fluorine in amorphous germanium-silicon alloy films
3. The effects of incorporating fluorine in amorphous germanium-silicon alloy films
4. Properties of hydrogenated and fluorinated amorphous silicon–carbon alloy films prepared by magnetron sputtering
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