Electrical characterization of an operating Sipn-junction diode with scanning capacitance microscopy and Kelvin probe force microscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1375803
Reference13 articles.
1. Semiconductor electronics and the birth of the modern science of surfaces
2. Charges on Oxidized Silicon Surfaces
3. Imaging the depletion zone in a Si lateral pn junction with scanning tunneling microscopy
4. Kelvin probe force microscopy
5. Mapping of mobile charges on insulator surfaces with the electrostatic force microscope
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