Spiral scanning nano-profiler using normal vector tracing method

Abstract

Unlike interferometers that obtain data from the entire sample, three-dimensional (3D) measuring instruments acquire data from multiple points. A nano-profiler measures slopes at different points on the surface to determine the sample shape, while a coordinate measuring machine (CMM) utilizes contact or non-contact height displacement probes for taking measurements. Therefore, the 3D measurement time increases if the area to be measured is wide. This leads to a reduced measurement accuracy owing to environmental changes. To reduce the 3D measurement time, a nano-profiler that rotates measured objects at a constant velocity and quickly scans each measurement point by following a spiral trajectory was designed. The developed nano-profiler measures angular distribution instead of height distribution. This makes it possible to reduce the drive error during rotation. Compared to an interferometer, the measurement time was reduced from 163 to 17 min with the nano-profiler and a 10 nm peak-to-valley difference was achieved. The slope measurement with spiral scanning was confirmed to be a quick and accurate shape measurement technique that can be used while manufacturing high-precision optical components.