Measurements of the electron energy distribution function in an Ar/CF4 inductively coupled plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1398775
Reference7 articles.
1. Measurement of electron energy distribution in low-pressure RF discharges
2. The electron-energy distribution function in a shielded argon radiofrequency inductive discharge
3. Determination of electron temperatures in plasmas by multiple rare gas optical emission, and implications for advanced actinometry
4. Diagnostics of low-density glow discharge plasmas using Thomson scattering
5. Measurement of non‐Maxwellian electron energy distributions in an inductively coupled plasma
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3. Development of a Cavity Enhanced Thomson and Raman Scattering Diagnostic;54th AIAA Aerospace Sciences Meeting;2016-01-02
4. The effect of F2attachment by low-energy electrons on the electron behaviour in an Ar/CF4inductively coupled plasma;Plasma Sources Science and Technology;2012-03-12
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