Epitaxial Growth of Silicon on Hexagonal Silicon Carbide
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1708571
Reference13 articles.
1. Preparation of Epitaxial GaAs and GaP Films by Vapor Phase Reaction
2. Single‐Crystal Boron Films on Silicon
3. The silicon-germanium n-p heterojunction
4. Single‐Crystal Silicon on a Sapphire Substrate
5. Grown-film silicon transistors on sapphire
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2. DRY ETCHING OF SIC;Silicon Carbide Microelectromechanical Systems for Harsh Environments;2006-06
3. References;Thin Films by Chemical Vapour Deposition;1990
4. The Current Status of Silicon-On-Sapphire and other Heteroepitaxial Silicon-On-Insulator Technologies;MRS Proceedings;1984
5. Silicon-on-Insulator for VLSI and VHSIC;VLSI Electronics Microstructure Science;1982
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