Silicon dry oxidation kinetics at low temperature in the nanometric range: Modeling and experiment
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2711764
Reference35 articles.
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4. Two-dimensional thermal oxidation of silicon—I. Experiments
5. Thermal Oxidation of Silicon in Dry Oxygen Growth‐Rate Enhancement in the Thin Regime: I . Experimental Results
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