Effect of electrode/dielectric interface on energy storage performance of BaZr0.35Ti0.65O3 film capacitors

Abstract

In this work, correlative parameters of the interfacial layer adjacent to an electrode in BaZr0.35Ti0.65O3 (BZT) films, including the thickness of an interface layer ( δ), the effective charge density ( Neff) in a depleted layer, and other material related parameters, were evaluated. To the 145 nm-thick BZT films on different bottom electrodes, the sample with thick δ and large Neff behaved with slim P– E loops (efficiency >85.0%) and a desirable energy density of 42.1 J/cm3. While in the bulk effect dominated 300 nm-thick BZT films, a much high energy density of 83.5 J/cm3 with an efficiency of 80.5% was achieved. These suggest that the energy storage properties can be modulated through the control of the structure of the electrode/BZT interface and the film thickness.