Effects of elastic stress introduced by a silicon nitride cap on solid-phase crystallization of amorphous silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371042
Reference8 articles.
1. Preferential nucleation along SiO2steps in amorphous Si
2. Device application and structure observation for hemispherical‐grained Si
3. Crystallization of Amorphous Silicon with Clean Surfaces
4. Effects of strain on crystallization of amorphous silicon characterized by laser Raman spectroscopy
5. Critical volume fraction of crystallinity for conductivity percolation in phosphorus‐doped Si:F:H alloys
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