1. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
2. Collaboration Innovation Center of Electronic Materials and Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
3. Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328 Dresden, Germany
4. State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
5. Namlab gGmbH and Institute for Semiconductors and Microsystems, TU Dresden, Nöthnitzer Strasse 64, 01187 Dresden, Germany
6. Technische Universität Chemnitz, Department of Materials for Nanoelectronics, Faculty of Electrical Engineering and Information Technology, Chemnitz 09126, Germany