Synthesis and characterization of 10 nm thick piezoelectric AlN films with high c-axis orientation for miniaturized nanoelectromechanical devices
Author:
Affiliation:
1. Electrical and Computer Engineering Department, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213, USA
2. Microelectronics Department, Electronics Research Institute, 33 El Bohouth St., Dokki, Giza, Egypt
Funder
DARPA
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Reference26 articles.
1. Nanoelectromechanical contact switches
2. S. G. Narendra and A. Chandrakasan, Leakage in Nanometer CMOS Technologies (Springer, New York, 2006).
3. Limits on Silicon Nanoelectronics for Terascale Integration
4. Body-Biased Complementary Logic Implemented Using AlN Piezoelectric MEMS Switches
5. Electromechanical Computing at 500°C with Silicon Carbide
Cited by 20 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Klein tunneling of gigahertz elastic waves in nanoelectromechanical metamaterials;Device;2024-08
2. Materials for electronically controllable microactuators;MRS Bulletin;2024-02
3. Surface chemistry in atomic layer deposition of AlN thin films from Al(CH3)3 and NH3 studied by mass spectrometry;Journal of Materials Chemistry C;2024
4. Design and simulation of piezoelectric MEMS logic gates;Ferroelectrics;2023-01-02
5. Transduction;Fundamentals of Nanomechanical Resonators;2023
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3