Ultrahigh x-ray reflectivity from W∕Al2O3 multilayers fabricated using atomic layer deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2161117
Reference22 articles.
1. The fabrication of stable platinum–silicon oxide multilayers for X-ray mirrors
2. Soft X-Ray Optics
3. Multilayers For X-Ray Optics
4. Surface Chemistry for Atomic Layer Growth
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