High figure-of-merit NEMS thermal detectors based on 50-nm thick AlN nano-plate resonators
Author:
Affiliation:
1. Northeastern University, Boston, Massachusetts 02115, USA
Funder
National Science Foundation
U.S. Department of Homeland Security
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.5128643
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