Thermal IR Detection With Nanoelectromechanical Silicon Nitride Trampoline Resonators
Author:
Affiliation:
1. Institute of Sensor and Actuator Systems, Vienna University of Technology (TU Wien), Vienna, Austria
Funder
European Research Council under the European Union’s Horizon 2020 Research and Innovation Program
Invisible-Light Labs GmbH
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/10017147/09965393.pdf?arnumber=9965393
Reference38 articles.
1. Micromechanical Bolometers for Subterahertz Detection at Room Temperature
2. Chapter 8 Tunneling Infrared Sensors
3. Ultrathin 2 nm gold as impedance-matched absorber for infrared light
4. Infrared Absorption of Thin Metal Films
5. Fundamentals of Nanomechanical Resonators
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