Thermal IR Detection With Nanoelectromechanical Silicon Nitride Trampoline Resonators

Author:

Piller Markus1ORCID,Hiesberger Johannes1,Wistrela Elisabeth1,Martini Paolo1ORCID,Luhmann Niklas1ORCID,Schmid Silvan1ORCID

Affiliation:

1. Institute of Sensor and Actuator Systems, Vienna University of Technology (TU Wien), Vienna, Austria

Funder

European Research Council under the European Union’s Horizon 2020 Research and Innovation Program

Invisible-Light Labs GmbH

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Analysis of Silicon Nitride Trampoline Resonators for Ultrasensitive Infrared Detection;2023 IEEE Photonics Conference (IPC);2023-11-12

2. Direct measurement of a spatially varying thermal bath using Brownian motion;Physical Review Research;2023-11-06

3. Photothermal Microscopy and Spectroscopy with Nanomechanical Resonators;The Journal of Physical Chemistry C;2023-11-06

4. Towards an optomechanical photon-noise limited thermal IR detector;2023 IEEE Nanotechnology Materials and Devices Conference (NMDC);2023-10-22

5. Analysis of Thermal Infrared Detection via Silicon Nitride Trampoline Nanomechanical Resonator;2023 IEEE Research and Applications of Photonics in Defense Conference (RAPID);2023-09

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