Atomic layer epitaxy of AlAs using thermally decomposed gas molecules
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.106662
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1. GaAs/AlGaAs quantum well lasers with active regions grown by atomic layer epitaxy
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3. Stimulated emission from ultrathin InAs/GaAs quantum well heterostructures grown by atomic layer epitaxy
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3. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process;Journal of Applied Physics;2005-06-15
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