Author:
Meguro T.,Iwai S.,Aoyagi Y.,Ozaki K.,Yamamoto Y.,Suzuki T.,Okano Y.,Hirata A.
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference19 articles.
1. Extended Abstracts Intern. Conf. on Solid State Diveces and Materials;Suntola,1984
2. Atomic layer epitaxy
3. Molecular Layer Epitaxy
4. Atomic layer epitaxy of III‐V binary compounds
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