Author:
Celler G. K.,Trimble L. E.,Frackoviak J.,Jurgensen C. W.,Kola R. R.,Novembre A. E.,Weber G. R.
Subject
Physics and Astronomy (miscellaneous)
Cited by
11 articles.
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1. Development of x-ray mask fabrication process using w-sputtering;Metals and Materials;1997-07
2. Focused-Ion-Beam-Induced Gas Etching;Japanese Journal of Applied Physics;1994-12-30
3. Atomic force microscopy study of the microroughness of SiC thin films;Thin Solid Films;1994-09
4. Physical properties of the x-ray membrane materials;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1993-11
5. Patterning of x-ray masks using the negative-acting resist P(SI-CMS);Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1993-11