X-ray lithography-Reference-Cited by-同舟云学术

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X-ray lithography

Published:1988-01 Issue:1 Volume:6 Page:107
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Heuberger A.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 94 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nano- and Micro-Patterning of Gold Nanoparticles on PEG- Based Hydrogels for Controlling Cell Adhesion;Noble and Precious Metals - Properties, Nanoscale Effects and Applications;2018-07-04

2. Current development of 1D and 2D metallic nanomaterials for the application of transparent conductors in solar cells: Fabrication and modeling;Nano-Structures & Nano-Objects;2018-07

3. Suppression of quantum noises in coherent atom lithography through squeezing;Journal of the Optical Society of America B;2018-03-13

4. Stencil Lithography for Scalable Micro- and Nanomanufacturing;Micromachines;2017-04-19

5. Electron beam induced epitaxial crystallization in a conducting and insulating a-LaAlO3/SrTiO3system;RSC Advances;2017

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