Electron beam induced epitaxial crystallization in a conducting and insulating a-LaAlO3/SrTiO3system-Reference-Cited by-同舟云学术

Electron beam induced epitaxial crystallization in a conducting and insulating a-LaAlO3/SrTiO3system

Published:2017 Issue:64 Volume:7 Page:40279-40285
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Lee Gwangyeob¹²³⁴⁵^ORCID,Moon Seon Young⁶²³⁴,Kim Jinyeon¹²³⁴⁷,Baek Seung-Hyub⁶²³⁴⁸^ORCID,Kim Do Hyang⁵⁹¹⁰⁴,Jang Ho Won⁷¹¹¹²⁴^ORCID,Chang Hye Jung¹²³⁴⁸

Affiliation:

1. Advanced Analysis Center

2. Korea Institute of Science and Technology

3. Seoul 02792

4. South Korea

5. Department of Materials Science and Engineering

6. Electronic Materials Research Center

7. Department of Materials Science and Engineering and Research Institute of Advanced Materials

8. Department of Nanomaterials Science and Technology

9. Yonsei University

10. Seoul 03722

11. Seoul National University

12. Seoul 08826

Abstract

We report the effect of the interfacial conductivity on the e-beam-induced crystallization of an oxide a-LaAlO₃thin film on the SrTiO₃substrate and the kinetics can be controlled by the electrical conductivity of the interface and the dose rate.

Funder

National Research Foundation of Korea

Korea Institute of Science and Technology

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2017/RA/C7RA06353A

Reference53 articles.

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2. Electron beam lithography: resolution limits and applications