Shear-mode scanning capacitance microscope
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1371523
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1. Dopant and carrier profiling in modulation‐doped GaAs multilayers with cross‐sectional scanning tunneling microscopy
2. Kelvin probe force microscopy for characterization of semiconductor devices and processes
3. Low weight spreading resistance profiling of ultrashallow dopant profiles
4. Imaging VLSI Cross Sections by Atomic Force Microscopy
5. Two-dimensional scanning capacitance microscopy measurements of cross-sectioned very large scale integration test structures
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1. Surface potential mapping of p+/n-well junction by secondary electron potential contrast with in situ nano-probe biasing;Microelectronic Engineering;2012-07
2. Profiling $\hbox{p}^{+}/\hbox{n}$-Well Junction by Nanoprobing and Secondary Electron Potential Contrast;IEEE Electron Device Letters;2011-07
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